檢漏儀器
Leak detectors: the answer to all your leaks, no matter how big or small PV leak detectors trace every leak.
泄漏探測器：不管泄漏情況是大是小，PV泄漏探測器均能精確跟蹤。
No leak is too small or too big to escape our leak detectors.
無論多大或多小的泄漏，都不能逃過泄漏探測器的法眼。
It doesn’t matter whether you are looking for water, oil, fuel, refrigerant, gas, steam, air or vacuum leaks.
不管是水、油、燃料、制冷劑、氣體、蒸汽、空氣的泄漏，還是真空泄漏，都能被探測到。
From miniature electronic units right up to large-volume vessels, from media escaping from vacuum systems to gases entering them – the uses for leak detectors are as broad as the range of industrial products.
從微型電子裝置到體積龐大的容器，從來自真空系統(tǒng)逸出的介質(zhì)到進(jìn)入此等真空系統(tǒng)的氣體，泄漏探測器使用的范圍與工業(yè)產(chǎn)品的使用范圍一樣寬廣。
The extensive range of PV leak detectors provides the answer for all these requirements.
Leak detectors for various requirements: portable, compact and stationary units Our portable leak detectors are used both for mobile leak detection “on site”, such as company premises, as well as for worldwide service jobs in a variety of different locations.
PV泄漏探測器的廣泛范圍為所有此等需要提供答案。滿足各種需要的泄漏探測器：袖珍型、緊湊型及固定型。我們的袖珍型泄漏探測器可用于現(xiàn)場的移動泄漏探測，如公司場所，也可以用于位于不同地方的全球范圍服務(wù)作業(yè)。
Our leak detectors stand out above all due to their high performance combined with low weight.
The compact leak detectors are used first and foremost for stationary applications to detect leaks and test for leak tightness.
我們的泄漏探測器之所以如此出眾，在于性能高，重量輕。緊湊型泄漏探測器首先和主要用于靜態(tài)的應(yīng)用，以探測泄漏并檢驗泄漏密封情況。
They are also portable thanks to a special leak detector cart.
它們也是袖珍型的，這歸功于一個特殊泄漏探測器小車設(shè)計。
Compact leak detectors are used in widely ranging industries, from applications in heavy industry right up to clean room applications.
緊湊型泄漏探測器可用于廣泛的工業(yè)場合，從重工業(yè)應(yīng)用到潔凈室應(yīng)用，不一而足。
In this latter case, the dry versions of the leak detectors are being used.
在后一種情況下，使用的是干式泄漏探測器。
Stationary high-performance leak detectors are used where extremely short cycle times and fast cleanup of Helium background are required.
在需要以極短循環(huán)周期快速清理氦氣的情況下，則使用固定型高性能泄漏探測器。
Our leak detectors of the ASM 192 and ASM 1002 series are used in applications ranging from large-scale testing of electronic components for leak tightness up to highly sensitive applications in vacuum and medical technology or research and development.
ASM 192 和ASM 1002 系列泄漏探測器可使用于如下范圍的應(yīng)用場合：從電子元件的大規(guī)模密封性檢驗，到在真空和醫(yī)療技術(shù)、研究和開發(fā)中的高度敏感性應(yīng)用。
Leak detection with the test gas Helium:
Safe.
Quantitative.
Repeatable.
泄漏探測可以檢驗氦氣：
安全
定量
可重復(fù)
 
Helium leak detectors are the ideal solution for leak detection and leak-tightness testing under vacuum.
氦氣泄漏探測器是在真空條件下泄漏探測和密封性檢驗的理想解決方案。
The test gas Helium is safe and a small, light molecule which is suitable for detecting micro leaks.
氦氣檢驗是安全的，小而輕的分子是適合于探測微觀泄漏的。
The detection range of Helium in vacuum tests lies between 10 -2 and 10 -13 Pa · m 3 /s.
在真空檢驗情況下，氦氣的探測范圍為在10-2和10-13 Pa·m³ /s 之間。
Helium leak detection is extremely accurate, quantitative and repeatable.
氦氣泄漏探測是非常準(zhǔn)確的、定量的和可重復(fù)的。
Fast cycle times are a further advantage.
短循環(huán)周期是另外一個優(yōu)勢。
Manual sniffing or spraying is often the easiest way to detect a leak with Helium.
人工嗅聞或噴灑往往是以氦氣探測泄漏的最簡單的方法。
But it is also possible to use automatic leak detection solutions which are independent of the operator and provide a considerably higher detecting speed.
然而，也可以使用自動泄漏探測解決方案，這種方案是獨(dú)立于操作者的，能提供高出許多的探測速度。
The integral leak detection is designed to achieve pre-defined quality and component throughput levels.
整體探測的設(shè)計目的就是為了獲得預(yù)定的質(zhì)量和元件生產(chǎn)量水平。
The use of test gas leak detection methods has the bonus of delivering extra data compared to traditional leak detection methods such as bubble testing or pressure drop methods.
與傳統(tǒng)的泄漏探測方法（如泡沫檢驗或壓力下降方法）相比，檢驗氣體泄漏探測方法的使用具有能提供更多數(shù)據(jù)的優(yōu)勢。
These data can be used to improve production processes and successfully detect every leak.
此等數(shù)據(jù)則能用于改進(jìn)生產(chǎn)過程，并成功探測每一處的泄漏。
Portable Leak detectors by PV are the ideal solution for leak detection in maintenance applications thanks to their compact size and lightweight design.
歸功于其緊湊外形和輕型設(shè)計，PV袖珍型泄漏探測器是維護(hù)應(yīng)用場合泄漏探測的理想解決方案。
 
Portable Leak detectors by PV are the ideal solution for leak detection in maintenance applications thanks to their compact size and lightweight design.
歸功于其緊湊外形和輕型設(shè)計，PV袖珍型泄漏探測器是維護(hù)應(yīng)用場合泄漏探測的理想解決方案。
 
Leak Detectors for mobile maintenance applications Portable leak detectors are our answer to any demands of maintenance work where mobility plays a crucial role.
用于移動維護(hù)應(yīng)用的泄漏探測器
袖珍型泄漏探測器是我們?yōu)闈M足移動性起到關(guān)鍵作用情況下任何維護(hù)作業(yè)需要而給出的解決方案。
With these applications in mind, it is important that the leak detectors used are compact, lightweight and portable.
就此等應(yīng)用而言，記住所用泄漏探測器是緊湊的、輕型的和袖珍型的是重要的。
Our ASM 310 and MiniTest portable leak detectors, weighing in at 21 kg and 5 kg respectively, are more than 50 % lighter than conventional units.
我們的ASM 310 泄漏探測器和微型檢驗袖珍型泄漏探測器，其重量分別為21kg和5kg，要比傳統(tǒng)裝置輕50%以上。
They have universal mains connections to allow them to be used in any part of the world.
它們都有通用的電源接頭，使之可以用于全世界的任何地方。
Transport boxes are available as accessories to even allow these units to be taken on a plane, typically when leak detection jobs are carried out by service engineers who are called upon to work all over the world.
運(yùn)輸盒體作為輔件也是可獲的，使此等裝置可以在飛機(jī)上攜帶，特別是在泄漏探測作業(yè)需要由響應(yīng)全球各個地方呼叫的服務(wù)工程師予以解決的情況下。
Innovative technologies are what distinguish our leak detectors.
創(chuàng)新技術(shù)使我們的泄漏探測器與眾不同。
They are equipped with graphic color displays and are easy to operate from a detachable control panel or from a distance using a remote control.
它們配備了圖形化彩色顯示器，易于在一個可分拆的控制面板或者遠(yuǎn)程控制器上進(jìn)行操作。
The menu navigation is user-friendly and easy to operate.
菜單導(dǎo)航是用戶友好型的，而且易于操作。
The ASM 310 Leak Detector: compact design and high performance The ASM 310 portable leak detector stands out particularly due to its smart design with a retractable handle and its small footprint.
ASM 310泄漏探測器：緊湊設(shè)計和高級性能
ASM 310 泄漏探測器之所以如此出眾，尤其得歸功于其智能設(shè)計，體現(xiàn)在有一個可伸縮的手柄和較小占用空間。
At only 21 kg it is still a complete vacuum system, it has the same detector technology and offers the same level of sensitivity as larger models.
雖然僅有21kg，它仍然是一個完整的真空系統(tǒng)，具有同樣的探測器技術(shù)，并提供與較大型號裝置同樣水平的敏感度。
Thanks to the clean, oil-free pumping system, the ASM 310 is the right choice for leak detection in systems which do not tolerate any contamination.
歸功于清潔的無油泵送系統(tǒng)， ASM 310對不允許有任何污染的系統(tǒng)的泄漏探測是正確選擇。
It provides high performance in leak testing where mobility is crucial.
在移動性起到關(guān)鍵作用的情況下，它能提供泄漏檢驗的高性能。
The ASM 310 can be operated in any position and has an integrated SD memory card for data recording.
ASM 310可以在任何位置進(jìn)行操作，帶有一個集成的SD記憶存儲卡，可用于數(shù)據(jù)記錄。
In addition to data, configurations and operating parameters can be documented using the SD card and can be downloaded or transferred to other devices.
除數(shù)據(jù)外，配置和操作參數(shù)也可以使用該SD卡予以記錄，并被下載或傳輸?shù)狡渌�裝置。
 
The intuitive menu can be individually adapted and protected with a password.
直觀的菜單可以是個別適合的，并有密碼保護(hù)。
This prevents unauthorized changes from being made to the settings.
這就能夠阻止對有關(guān)設(shè)置進(jìn)行未經(jīng)授權(quán)的更改。
The portable MiniTest combines innovative technology with ultralight weight The MiniTest portable helium leak detector weighs only a sensational 5 kg!
袖珍型微型檢驗探測器將創(chuàng)新性技術(shù)和超輕重量組合在一起。袖珍型微型氦氣泄漏探測器重量只有驚人的5kg！
It is the first vacuum leak detector on the market which works with a quartz window sensor.
Thanks to this innovative technology, it stands out due to its lightweight design and small footprint.
它是市場上第一種以石英窗口傳感器配合工作的真空泄漏探測器。歸功于這種創(chuàng)新性技術(shù)，它才如此與眾不同，體現(xiàn)在輕型重量設(shè)計和很小占用空間。
The uncomplicated operation and optional wireless remote control enable helium leak detection to be carried out even in large systems by only one person.
無復(fù)雜可言的操作和可選無線遠(yuǎn)程控制使得氦氣泄漏探測可以由一位工作人員即使是在大型系統(tǒng)內(nèi)進(jìn)行作業(yè)。
The MiniTest can work at a high inlet pressure of up to 200 mbar and is not sensitive to water vapor.
微型檢驗探測器可以在高進(jìn)氣壓力（可高達(dá)200 bar）的情況工作，而且不對水蒸汽具有敏感性。
This makes it the ideal solution for leak detection in power plants, vacuum furnaces and vacuum systems as well as in heat exchangers.
這使它成為電廠、真空爐、真空系統(tǒng)以及熱交換器應(yīng)用場合泄漏探測的理想解決方案。
The data recording function on the remote control via USB interface makes this unit a user-friendly data logger.
通過USB接口實(shí)現(xiàn)的位于遠(yuǎn)程控制器上數(shù)據(jù)記錄功能使該裝置成為用戶友好型的數(shù)據(jù)記錄員。
Since it is practically maintenance-free, it is also cost-efficient both in operation and in long-term use.
因為它實(shí)際上是無須維護(hù)的，所以在運(yùn)行當(dāng)中以及長期使用過程中，它都是成本效益很高的。
The leak detectors in our ASM 340 series guarantee top performance in vacuum or sniffing leak detection for various applications, from maintenance to applications in small production environments.
我們的ASM 340 泄漏探測器確保各種應(yīng)用場合下（在小型生產(chǎn)環(huán)境從維護(hù)到應(yīng)用）在真空或嗅聞泄漏探測方面的頂級性能。
These dependable leak detectors can be used both for qualitative localization of leaks as well as quantitative global or local testing.
此等可靠的泄漏探測器可用于泄漏的定量化位置，也可以用于全球的或本地的定量化檢驗。
Multipurpose leak detectors by PV combine high performance and easy operation with the reliability which you have come to expect.
PV的多用途泄漏探測器將高性能、易操作和您期待的可靠性組合在一起。
ASM 340 - the best in class compact multipurpose leak detectors The leak detectors in our ASM 340 series guarantee top performance in vacuum or sniffing leak detection for various applications, from maintenance to applications in small production environments.
ASM 340 – 系緊湊多用途泄漏探測器類別中最好的。我們ASM 340 系列的泄漏探測器確保各種應(yīng)用場合下（在小型生產(chǎn)環(huán)境從維護(hù)到應(yīng)用）在真空或嗅聞泄漏探測方面的頂級性能。
 
These dependable leak detectors can be used both for qualitative localization of leaks as well as quantitative global or local testing.
此等可靠的泄漏探測器可用于泄漏的定量化位置，也可以用于全球的或本地的定量化檢驗。
 
They are the only leak detectors in their class offering qualitative leak detection starting at 100 hPa before reaching the inlet test pressure.
它們是該類別中唯一能提供定量化泄漏探測的泄漏探測器，定量化的起點(diǎn)為100 hPa，到達(dá)到進(jìn)氣檢驗壓力為止。
The ASM 340 is characterized by its powerful pumping system and available in conventional or dry versions.
ASM 340以強(qiáng)大的泵送系統(tǒng)為其特征，而且有傳統(tǒng)的或干式版本。
Easy operation, ultra fast response time and short recovery time are among the outstanding features of these compact multipurpose units.
易于操作、超快響應(yīng)時間和較短恢復(fù)時間都是此等緊湊型多用途裝置的卓越特性。
The ASM 340 is the perfect solution for everyday testing even in severe test conditions.
即使是在嚴(yán)苛檢驗情況下，ASM 340都是日常檢驗的理想解決方案。
ASM 340 with conventional pumping Those compact leak detectors are equipped with the largest backing pumps of their class allowing extremely fast cycle times.
ASM 340 帶有傳統(tǒng)的泵送系統(tǒng)。此等緊湊泄漏探測器配備有其同類別中最大的支持泵，使之有極短的循環(huán)周期。
ASM 340 D with dry pumps The dry ASM 340 D units are equipped with diaphragm pumps.
They are used in any applications where very clean test conditions are required.
帶干式泵的ASM 340
干式ASM340 裝置配備有隔膜泵。在任何需要非常清潔的檢驗情況下，均可以使用這種裝置。
ASM 340 I without backing pump This specific unit offers maximum flexibility and is typically used for the integration into leak detection systems.
不帶支持泵的ASM 340
這種特殊的裝置提供了最大的彈性，主要用于集成到泄漏探測系統(tǒng)。
Customer benefits:
客戶收益：
Fastest time to test in its class High backing pump capacity for versatile use Rapid response time due to high helium pumping speed Unique capability to detect leaks starting at 100 hPa Impressive results in sniffing test mode, with 5•10 -10 Pa m 3 /s minimum detectable leak rate for helium Low maintenance due to rugged design Integrated SD memory card for recording, downloading and parameter setting Detachable color control panel for enhanced ergonomics User friendly and customizable interface Complete range of I/O and Profibus communication available
在其類別當(dāng)中，具有最短的檢驗時間；適合各種用途的高級支持泵容量；因高氦氣泵送速度而帶來的快速響應(yīng)時間；探測從100 hPa起的泄漏的獨(dú)一無二的能力；在嗅聞檢驗?zāi)Ｊ街辛钊擞∠笊羁痰慕Y(jié)果；因氦氣低維護(hù)而實(shí)現(xiàn)的5•10 -10 Pa m ³ /s最小可探測泄漏比率；因堅固設(shè)計集成的SD記憶存儲卡而實(shí)現(xiàn)的記錄、下載和參數(shù)設(shè)置；加強(qiáng)人機(jī)工程學(xué)應(yīng)用的可分拆的彩色控制面板；用戶友好型和定制的界面；可獲的完整的輸入/輸出（I/O）和過程現(xiàn)場總線（Profibus）通信系統(tǒng)。
 
Applications
應(yīng)用
R & D Aeronautic industry Mechanical engineering Measuring technology Refrigeration Air conditioning Semiconductor technology Leak detection systems
研究和開發(fā)、航空業(yè)、機(jī)械工程、測量技術(shù)、制冷、空調(diào)、半導(dǎo)體技術(shù)中所用的泄漏測試系統(tǒng)
The modular leak detector for easy and quick integration into industrial leak detection systems provides you with high performance, reliable and repeatable testing.
可用于簡易快捷集成到工業(yè)泄漏探測系統(tǒng)的模塊泄漏探測器能提供高性能的、可靠的和可重復(fù)的檢驗。
Leak Detectors for Industrial Leak Detection Systems Modular leak detectors were designed for integration into industrial leak detector systems.
用于工業(yè)泄漏探測系統(tǒng)的泄漏探測器，模塊泄漏探測器的設(shè)計目的就是集成到工業(yè)泄漏探測系統(tǒng)。
They can be flexibly adapted to a wide range of leak detection applications and environments in the production of electrical and mechanical parts, such as for the automotive industry, and in evaporator and compressor production for refrigeration and air conditioning.
它們可以靈活地適應(yīng)電氣和機(jī)械部件生產(chǎn)過程中廣泛范圍的泄漏探測應(yīng)用和環(huán)境，如汽車行業(yè)，以及適應(yīng)制冷和空調(diào)行業(yè)蒸發(fā)器和壓縮機(jī)生產(chǎn)過程中泄漏探測應(yīng)用和環(huán)境。
The modular design and small footprint of the ASI 30 enables it to be easily integrated into existing systems.
ASI 30 的模塊化設(shè)計及小占用空間使之可以容易集成到現(xiàn)有系統(tǒng)。
A particular feature is the leak detector's ease of use.
特別的特點(diǎn)就是泄漏探測者使用的簡易性。
Its high reliability and short maintenance times are crucial for avoiding production downtimes and quality problems.
其高可靠性和短維護(hù)時間對避免生產(chǎn)中斷和質(zhì)量問題而言是關(guān)鍵的。
The ASI 30: flexible and reliable The ASI 30 modular leak detector is specially adapted to meet the requirements of machine builders and their end users.
ASI 30：有彈性和可靠性。ASI 30 模塊特別適合于滿足機(jī)器制造者及其終端用戶需求的場合。
The modular design of this leak detector allows it to be integrated flexibly and easily into leak detection systems.
這種泄漏探測的模塊化設(shè)計使之可以靈活便捷地集成到泄漏探測系統(tǒng)。
The vacuum module with its analyzer cell and calibrated test leak can be installed in any position.
The electronic module and the optional control panel are ready for inserting in half 19" racks.
帶有分析儀單元和校準(zhǔn)檢驗泄漏的真空模塊可以在任何位置予以安裝。電子模塊和可選控制面板已經(jīng)就緒，可以插入半19”機(jī)架當(dāng)中。
They can be fitted in any part of the system or in a cabinet under controlled environmental conditions.
在可控的環(huán)境條件下，它們可以在系統(tǒng)的任何部分或在一個柜體內(nèi)固定。
The leak detector can be controlled without a control panel simply through a PC or PLC as it has a wide range of interfaces and complies with all industrial standards.
泄漏探測器可以僅僅通過一臺電腦或PLC（可編程序控制器）進(jìn)行控制，而無需一個控制面板，因為它有范圍廣泛的界面，并符合所有有關(guān)工業(yè)標(biāo)準(zhǔn)。
The rugged design of the ASI 30 ensures long-term maximum availability of the unit under production conditions.
ASI 30的堅固設(shè)計確保了在生產(chǎn)條件下該裝置的最大長期可獲性。
 
多級泵：
Multi-stage Roots pumps by PV produce clean and dry vacuum for various applications and markets.
PV羅茨多級泵為各種應(yīng)用和市場生產(chǎn)清潔和干燥真空環(huán)境。
The solution for clean and dry applications Multi-stage Roots pumps by PV are used in different areas of application.
作為清潔和干燥應(yīng)用場合的解決方案，PV羅茨多級泵可用于不同的應(yīng)用領(lǐng)域。
Small ACP-Roots pumps create, for example, the required fore-vacuum for turbopumps in particle accelerators.
小型ACP-羅茨泵能生產(chǎn)，例如，粒子加速器所用渦輪泵所需的前級真空。
Large ACP 120 with their high pumping speed and low final pressure are used in freeze-drying applications.
具有到泵送速度和低最終壓力的大型ACP 120可用于冷凍干燥應(yīng)用場合。
The A 100, A3P or A3H series dry pumps are used in large numbers as process pumps in the semiconductor and coating industry.
A 100、A3P或A3H系列干式泵作為過程泵可大量用于半導(dǎo)體和噴涂工業(yè)。
Nevertheless, all of these areas have one thing in common: they require a clean and dry vacuum.
The technology of the multi-stage Roots pumps is the perfect solution here.
然而，此等菱悅均有一個共同的特點(diǎn)：它們均需要清潔和干燥的真空環(huán)境。
Lubricants and sealing material between the rotor and stator are not required by the frictionless working pumping module.
無摩擦工作泵送環(huán)境不需要轉(zhuǎn)子和定子之間的潤滑劑和密封材料。
Thus, hydrocarbon vapor backstreaming can be avoided.
因此，可以避免烴類蒸汽的回流。
In the suction chamber of the pumps, no sealing materials are processed.
在泵的吸入室，無任何密封材料是被處理的。
This means the pumps are free of particles, extremely reliable and stable for a long period of time which results in low cost of ownership.
這意味著泵是沒有顆粒物的，長期內(nèi)均是非�？煽亢头�(wěn)定的，這將帶來業(yè)主的低成本結(jié)果。
Areas of usage for multi-stage Roots pumps in clean processes Air-cooled multi-stage Roots pumps from the ACP series are very low maintenance and are distinguished through their constant performance.
在清潔過程中羅茨多級泵以及ACP系列的空氣冷卻羅茨多級泵的使用領(lǐng)域是需要極少維護(hù)的，憑其恒定的性能脫穎而出。
They are used in analytical applications as well as in clean processes for semiconductor production and plasma cleaning.
它們可用于分析應(yīng)用場合以及半導(dǎo)體生產(chǎn)和等離子清洗行業(yè)的清潔過程當(dāng)中。
The compact Roots pump A 100 L can be easily integrated in systems due to their small dimensions.
A 100 緊湊羅茨泵因其較小尺寸而可以便捷集成到有關(guān)系統(tǒng)。
Load locks and transfer chambers from semiconductor and photovoltaic production systems are typical areas of application for this type of pump.
半導(dǎo)體和光伏生產(chǎn)系統(tǒng)的負(fù)載鎖和傳輸室是這種類型泵的典型應(yīng)用領(lǐng)域。
The multi-stage Roots pumps with water cooling of the ACP 120 series are produced of robust die cast metal.
ACP 120 系列的帶有水冷卻的羅茨多級泵是用結(jié)實(shí)的模鑄材料制成。
Just like the Roots vacuum pumping stations ACG 600, they are used in research and development, vacuum coating and metallurgy when high pumping speed is required.
就像羅茨真空泵送站ACG 600， 它們是用于需要較高泵送速度場合的研究、開發(fā)、真空噴涂和冶金行業(yè)的。
Aggressive applications are not a problem Multi-stage Roots pumps from the A3P series were developed for applications in medium duty processes for semiconductor and photovoltaic production, in which slightly corrosive gases or condensation must be transported.
具有侵略性的應(yīng)用也不是問題，A3P系列的羅茨多級泵的開發(fā)目的就是為了半導(dǎo)體和光伏生產(chǎn)所需媒介材料過程應(yīng)用的，在這種過程中輕微腐蝕性氣體或冷凝物是必需被運(yùn)輸出來的。
The pumps are compact and energy-efficient.
此等泵是緊湊的和高能效的。
The low noise development and the low vibration level are outstanding characteristics of the series.
低噪音開發(fā)和低振動水平是該系列的突出特點(diǎn)。
The pumps of the A3H series with a pumping speed of up to 1,800 m 3 /h are made of corrosion resistant materials.
泵送速度可高達(dá)1,800 m³/h 的A3H系列泵是用防腐材料制成的。
Media tolerability also with high gas throughput make these multi-stage Roots pumps the best solution for usage in CVD-processes in the semiconductor industry.
媒介容忍度以及高氣體生產(chǎn)量水平使此等羅茨多級泵成為半導(dǎo)體行業(yè)CVD過程應(yīng)用的最佳解決方案。
 
Harsh duty processes in the semiconductor production always provide new challenges for vacuum pumps.
半導(dǎo)體生產(chǎn)中的嚴(yán)酷工作過程總是會向真空泵提出新的挑戰(zhàn)。
Based on the proven technology of the dry multi-stage roots pumps, PV offers pump solutions with the A3H series with different pumping speeds for 300 mm-Fabs with 45 nm technology and less.
基于羅茨干式多級泵的被證實(shí)的技術(shù)，PV以A3H系列提供了泵解決方案，該方案以45 nm及更小的技術(shù)為300mm晶圓配備了不同的泵送速度。
 
A3H dry pumps for harsh duty processes Harsh duty processes in semiconductor production always provide new challenges for vacuum pumps.
用于半導(dǎo)體生產(chǎn)中嚴(yán)苛工作過程的A3H干式泵總是會向真空泵提出新的挑戰(zhàn)。
 
Based on the proven multi-stage Roots technology, PV offers pump solutions with the A3H series with different pumping speeds for 300 mm-Fabs with 45 nm technology nodes and less.
基于羅茨多級泵的被證實(shí)的技術(shù)，PV以A3H系列提供了泵解決方案，該方案以45 nm及更小的技術(shù)為300mm晶圓配備了不同的泵送速度。
 
Compared to previous process pumps, the gas throughput, particle tolerance and condensation resistance have been increased significantly.
與以往過程泵比較，氣體生產(chǎn)量、粒子容忍度和防冷凝已經(jīng)得到顯著提高。
Their multi-stage Roots technology guarantees a particle-free and dry vacuum.
其羅茨多級技術(shù)確保提供了無顆粒的干式泵。
The pumps are equipped with temperature sensors and inert gas flushing.
泵配備有溫度傳感器和惰性氣體沖洗裝置。
The optimal solution for the most demanding processes.
服務(wù)于最為需要的過程的可選解決方案
The dry pumps of the A3H series, through the use of corrosion-resistant materials, are optimal for demanding CVD processes in the semiconductor, photovoltaic or flat panel display production.
A3H系列干式泵，通過使用防腐蝕材料，是半導(dǎo)體、光伏或平板顯示器生產(chǎn)中迫切需要CVD過程的可選解決方案。
The high gas throughput is another characteristic of the series.
高氣體生產(chǎn)量是該系列的另一個特點(diǎn)。
A low noise emission and a low vibration level distinguish these multi-stage Roots pumps.
They are compliant with CE and Semi S2 standards.
較低噪音釋放和較低振動水平使此等羅茨多級泵與眾不同。
The A3H series for the most demanding processes saves operating costs The usage of these dry pumps supports a decrease in operating costs through low energy consumption.
服務(wù)與最為需要的過程的A3H系列節(jié)省了運(yùn)營成本。此等干式泵的使用通過較低能量消耗實(shí)現(xiàn)對運(yùn)營成本降低的支持。
Through the improved particle tolerance and the condensation resistance, the maintenance intervals and the lifetime of the pumps could be extended, which means an additional reduction of operating costs.
通過改進(jìn)的粒子容忍度和防冷凝，維護(hù)間隔和泵的壽命是可以得到延長的，這意味著又一次運(yùn)營成本的減少。
 
Advantages
優(yōu)勢
Longer maintenance intervals through improved particle tolerance and condensation resistance Optimal efficiency for demanding CVD processes through the use of more corrosion-resistant materials and high gas throughput Reduced operating costs through minimal energy consumption Minimal space needed through compact construction Low noise emission and low vibration level Compliant with CE and Semi S2 standards
通過改進(jìn)的粒子容忍度和防冷凝而實(shí)現(xiàn)的更長維護(hù)間隔期；通過使用更好防腐蝕材料和高氣體生產(chǎn)量而實(shí)現(xiàn)的服務(wù)于迫切需要的CVD過程的可選效率；通過最小化能量消耗而實(shí)現(xiàn)降低運(yùn)營成本；通過緊湊結(jié)構(gòu)設(shè)計實(shí)現(xiàn)只需最小的空間；低噪音釋放和低振動水平；符合CE和Semi S27標(biāo)準(zhǔn)。
 
The multi-stage roots pumps of the ACP series are designated for oil- and particle free applications in the pressure range between atmospheres up to 3 x 10-2 hPa.
ACP系列羅茨多級泵的設(shè)計目的就是為了在壓力范圍為大氣壓力和3 x 10-2 hPa之間的無油無粒子應(yīng)用場合的。
The air-cooled pumps are the optimal replacement for rotary vane pumps when used in residual gas analysis systems, electron microscopes or UHV-systems.
在用于剩余氣體分析系統(tǒng)、電子顯微鏡或UHV系統(tǒng)的情況下，空氣冷卻泵是旋轉(zhuǎn)葉片泵的最佳替代物。
 
Light duty processes require a clean and dry vacuum.
輕載過程需要一個清潔和干燥真空環(huán)境。
The multi-stage roots pumps by PV are the ideal solution for industrial applications and Research & Development.
PV羅茨多級泵是工業(yè)應(yīng)用和研究開發(fā)場合下的理想解決方案。
Dry pumps for light duty processes Based on the proven technology of the dry multi-stage roots pumps, PV offers a wide selection of high power pumps for light duty processes.
服務(wù)與輕載過程的干式泵
基于羅茨干式多級泵的被證明技術(shù)，PV提供服務(wù)于輕載過程的高能泵的廣泛選擇方案。
The most important characteristics for pumps in these applications are a high pumping speed and robustness as well as high reliability.
此等應(yīng)用中的泵的最重要的特點(diǎn)就是高泵送速度、健壯性和可靠性。
Air-cooled multi-stage roots pumps from the ACP series The multi-stage roots pumps of the ACP series are designated for oil- and particle free applications in the pressure range between atmospheres up to 3 x 10 -2 hPa.
ACP系列的羅茨空氣冷卻多級泵
ACP系列的羅茨多級泵設(shè)計目的就是為了在壓力范圍為大氣壓力和3 x 10-2 hPa之間的無油無粒子應(yīng)用場合的。
 
 
The air-cooled pumps are the optimal replacement for rotary vane pumps when used in residual gas analysis systems, electron microscopes or UHV-systems.
在用于剩余氣體分析系統(tǒng)、電子顯微鏡或UHV系統(tǒng)的情況下，空氣冷卻泵是旋轉(zhuǎn)葉片泵的最佳替代物。
 
They are ideal as a roughing pump for turbomolecular pumps.
作為用于低真空泵，它們是用于渦輪分子泵的理想解決方案。
The specially developed G version of the pumps is designed for the transportation of traces of corrosive gases.
經(jīng)過特別開發(fā)的此等泵的G版本的設(shè)計目的就是為了運(yùn)輸腐蝕性氣體的殘留。
This version of the ACP series is recommended for transfer chambers, process monitoring systems and ion beam applications.
ACP系列版本是推薦用于運(yùn)輸室、過程監(jiān)視系統(tǒng)和離子束應(yīng)用場合的。
The CV version of the air-cooled ACP series has a water vapor capacity of up to 1,000 grams per hour.
空氣冷卻ACP系列的CV版本具有的水蒸汽容量可達(dá)1,000g/h。
It is designed to avoid steam condensation in the pump block.
其設(shè)計就是為了避免泵體內(nèi)的蒸汽冷凝。
ACP 120 and ACG 600 for industrial applications Based on the tens of thousands of semiconductor process pumps installed worldwide, the ACP 120 provides the advantages of the multi-stage roots pumps in industrial applications as well.
用于工業(yè)應(yīng)用場合的ACP 120和ACG 600
基于安裝于全世界范圍的上萬臺半導(dǎo)體過程泵的應(yīng)用實(shí)踐，ACP 120也具備了工業(yè)應(yīng)用中羅茨多級泵的優(yōu)點(diǎn)。
The water-cooled pump can be obtained as a standard version for light duty applications as well as a purge gas version for slightly corrosive processes or for pumping down condensable mediums.
水冷卻泵可以作為用于輕載應(yīng)用版本而獲得，也可以作為浪涌氣體版本用于輕微腐蝕性過程的應(yīng)用場合，或者用于泵送可冷凝介質(zhì)的應(yīng)用場合。
The ACP 120 can be combined into different pumping stations with roots pumps.
ACP 120 可以組合進(jìn)帶羅茨泵的不同泵送站。
The roots pumping station ACG 600 may be the basis of a completely lubricant-free pumping system for vacuum solutions in the decorative or tool coating.
羅茨泵送站ACG 600可以是用于裝飾或工具噴涂真空解決方案的一個完整的免潤滑泵送系統(tǒng)的基礎(chǔ)。
The compact dry pump: the A 100 L The compact dry pump A 100 L was developed for the cost-saving integration in semiconductor production systems.
緊湊型干式泵：A100 L
緊湊型干式泵A 100 L的開發(fā)目的就是為了應(yīng)用于半導(dǎo)體生產(chǎn)系統(tǒng)的節(jié)約成本的集成方案。
 
The multi-stage roots pump is suitable for usage in clean rooms and can replace external pumps with a significantly higher pumping speed.
羅茨多級泵適合于清潔空間應(yīng)用場合，而且能夠以可觀的更高泵送速度替換外部泵。
Through variably adjustable speeds in the standby mode, the power consumption of the compact dry pump A 100 L can be additionally lowered.
通過調(diào)整備用模式中的可調(diào)速度，緊湊型干式泵A 100 L的能量消耗是進(jìn)一步得到降低。
 
Integrated pumps of the A100 series for light duty processes The pumps of the A100 series with their compact dimensions were specifically developed for flexible integration in semiconductor production facilities.
服務(wù)于輕載過程的A100系列的集成泵
具有緊湊結(jié)構(gòu)尺寸的A100系列泵是為半導(dǎo)體工廠中彈性集成而專門開發(fā)。
Designed for installation directly on the tool and fast pump down, this series of compact pumps for light applications is the perfect solution for load-lock and transfer chambers as well as for all other non-corrosive applications.
設(shè)計為直接在工具上安裝和快速的泵送，該系列用于輕載應(yīng)用的緊湊型泵是負(fù)載鎖、運(yùn)輸室以及其他非腐蝕性應(yīng)用的完美解決方案。
 
Integrated pumps set standards Since the market integration of the A 100 L pumps, they have revolutionized the integration of pumps in production facilities for the semiconductor industry.
集成泵設(shè)定了有關(guān)標(biāo)準(zhǔn)。鑒于A 100 L泵的市場集成，它們革新了服務(wù)于半導(dǎo)體行業(yè)生產(chǎn)設(shè)施的多泵集成方案。
Based on dry multi-stage Roots technology and despite their small dimensions, the pumps of the A100 series offer high pumping speeds and short pump down times.
基于羅茨干式多級泵技術(shù)，盡管只有較小尺寸，A 100 系列泵提供了高泵送速度和短泵送時間。
Today, integrated light duty pumps are state of the art and the A100 series is installed worldwide in many 300 mm semiconductor fabs.
今天，集成輕載泵是最先進(jìn)的，A100系列是在全世界范圍許多300 mm半導(dǎo)體晶圓工廠內(nèi)安裝的。
Integrated pumps for load-lock and transfer chambers In light duty applications like load-lock and transfer chambers, these pumps rule out vacuum line effects in pump installations.
在輕載應(yīng)用場合服務(wù)于負(fù)載鎖和運(yùn)輸室的集成泵清除了泵安裝中的真空線路效應(yīng)的影響。
Installation costs for vacuum lines, integration and commissioning are lowered through the use of the A100 series.
通過使用A100 系列，可以降低真空線路、集成和調(diào)試的安裝成本。

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