檢漏儀器
Leak detectors: the answer to all your leaks, no matter how big or small PV leak detectors trace every leak.
泄漏探測器：不管泄漏情況是大是小，PV泄漏探測器均能精確跟蹤。
No leak is too small or too big to escape our leak detectors.
無論多大或多小的泄漏，都不能逃過泄漏探測器的法眼。
It doesn’t matter whether you are looking for water, oil, fuel, refrigerant, gas, steam, air or vacuum leaks.
不管是水、油、燃料、制冷劑、氣體、蒸汽、空氣的泄漏，還是真空泄漏，都能被探測到。
From miniature electronic units right up to large-volume vessels, from media escaping from vacuum systems to gases entering them – the uses for leak detectors are as broad as the range of industrial products.
從微型電子裝置到體積龐大的容器，從來自真空系統(tǒng)逸出的介質(zhì)到進(jìn)入此等真空系統(tǒng)的氣體，泄漏探測器使用的范圍與工業(yè)產(chǎn)品的使用范圍一樣寬廣。
The extensive range of PV leak detectors provides the answer for all these requirements.
Leak detectors for various requirements: portable, compact and stationary units Our portable leak detectors are used both for mobile leak detection “on site”, such as company premises, as well as for worldwide service jobs in a variety of different locations.
PV泄漏探測器的廣泛范圍為所有此等需要提供答案。滿足各種需要的泄漏探測器：袖珍型、緊湊型及固定型。我們的袖珍型泄漏探測器可用于現(xiàn)場的移動泄漏探測，如公司場所，也可以用于位于不同地方的全球范圍服務(wù)作業(yè)。
Our leak detectors stand out above all due to their high performance combined with low weight.
The compact leak detectors are used first and foremost for stationary applications to detect leaks and test for leak tightness.
我們的泄漏探測器之所以如此出眾，在于性能高，重量輕。緊湊型泄漏探測器首先和主要用于靜態(tài)的應(yīng)用，以探測泄漏并檢驗(yàn)泄漏密封情況。
They are also portable thanks to a special leak detector cart.
它們也是袖珍型的，這歸功于一個(gè)特殊泄漏探測器小車設(shè)計(jì)。
Compact leak detectors are used in widely ranging industries, from applications in heavy industry right up to clean room applications.
緊湊型泄漏探測器可用于廣泛的工業(yè)場合，從重工業(yè)應(yīng)用到潔凈室應(yīng)用，不一而足。
In this latter case, the dry versions of the leak detectors are being used.
在后一種情況下，使用的是干式泄漏探測器。
Stationary high-performance leak detectors are used where extremely short cycle times and fast cleanup of Helium background are required.
在需要以極短循環(huán)周期快速清理氦氣的情況下，則使用固定型高性能泄漏探測器。
Our leak detectors of the ASM 192 and ASM 1002 series are used in applications ranging from large-scale testing of electronic components for leak tightness up to highly sensitive applications in vacuum and medical technology or research and development.
ASM 192 和ASM 1002 系列泄漏探測器可使用于如下范圍的應(yīng)用場合：從電子元件的大規(guī)模密封性檢驗(yàn)，到在真空和醫(yī)療技術(shù)、研究和開發(fā)中的高度敏感性應(yīng)用。
Leak detection with the test gas Helium:
Safe.
Quantitative.
Repeatable.
泄漏探測可以檢驗(yàn)氦氣：
安全
定量
可重復(fù)
 
Helium leak detectors are the ideal solution for leak detection and leak-tightness testing under vacuum.
氦氣泄漏探測器是在真空條件下泄漏探測和密封性檢驗(yàn)的理想解決方案。
The test gas Helium is safe and a small, light molecule which is suitable for detecting micro leaks.
氦氣檢驗(yàn)是安全的，小而輕的分子是適合于探測微觀泄漏的。
The detection range of Helium in vacuum tests lies between 10 -2 and 10 -13 Pa · m 3 /s.
在真空檢驗(yàn)情況下，氦氣的探測范圍為在10-2和10-13 Pa·m³ /s 之間。
Helium leak detection is extremely accurate, quantitative and repeatable.
氦氣泄漏探測是非常準(zhǔn)確的、定量的和可重復(fù)的。
Fast cycle times are a further advantage.
短循環(huán)周期是另外一個(gè)優(yōu)勢。
Manual sniffing or spraying is often the easiest way to detect a leak with Helium.
人工嗅聞或噴灑往往是以氦氣探測泄漏的最簡單的方法。
But it is also possible to use automatic leak detection solutions which are independent of the operator and provide a considerably higher detecting speed.
然而，也可以使用自動泄漏探測解決方案，這種方案是獨(dú)立于操作者的，能提供高出許多的探測速度。
The integral leak detection is designed to achieve pre-defined quality and component throughput levels.
整體探測的設(shè)計(jì)目的就是為了獲得預(yù)定的質(zhì)量和元件生產(chǎn)量水平。
The use of test gas leak detection methods has the bonus of delivering extra data compared to traditional leak detection methods such as bubble testing or pressure drop methods.
與傳統(tǒng)的泄漏探測方法（如泡沫檢驗(yàn)或壓力下降方法）相比，檢驗(yàn)氣體泄漏探測方法的使用具有能提供更多數(shù)據(jù)的優(yōu)勢。
These data can be used to improve production processes and successfully detect every leak.
此等數(shù)據(jù)則能用于改進(jìn)生產(chǎn)過程，并成功探測每一處的泄漏。
Portable Leak detectors by PV are the ideal solution for leak detection in maintenance applications thanks to their compact size and lightweight design.
歸功于其緊湊外形和輕型設(shè)計(jì)，PV袖珍型泄漏探測器是維護(hù)應(yīng)用場合泄漏探測的理想解決方案。
 
Portable Leak detectors by PV are the ideal solution for leak detection in maintenance applications thanks to their compact size and lightweight design.
歸功于其緊湊外形和輕型設(shè)計(jì)，PV袖珍型泄漏探測器是維護(hù)應(yīng)用場合泄漏探測的理想解決方案。
 
Leak Detectors for mobile maintenance applications Portable leak detectors are our answer to any demands of maintenance work where mobility plays a crucial role.
用于移動維護(hù)應(yīng)用的泄漏探測器
袖珍型泄漏探測器是我們?yōu)闈M足移動性起到關(guān)鍵作用情況下任何維護(hù)作業(yè)需要而給出的解決方案。
With these applications in mind, it is important that the leak detectors used are compact, lightweight and portable.
就此等應(yīng)用而言，記住所用泄漏探測器是緊湊的、輕型的和袖珍型的是重要的。
Our ASM 310 and MiniTest portable leak detectors, weighing in at 21 kg and 5 kg respectively, are more than 50 % lighter than conventional units.
我們的ASM 310 泄漏探測器和微型檢驗(yàn)袖珍型泄漏探測器，其重量分別為21kg和5kg，要比傳統(tǒng)裝置輕50%以上。
They have universal mains connections to allow them to be used in any part of the world.
它們都有通用的電源接頭，使之可以用于全世界的任何地方。
Transport boxes are available as accessories to even allow these units to be taken on a plane, typically when leak detection jobs are carried out by service engineers who are called upon to work all over the world.
運(yùn)輸盒體作為輔件也是可獲的，使此等裝置可以在飛機(jī)上攜帶，特別是在泄漏探測作業(yè)需要由響應(yīng)全球各個(gè)地方呼叫的服務(wù)工程師予以解決的情況下。
Innovative technologies are what distinguish our leak detectors.
創(chuàng)新技術(shù)使我們的泄漏探測器與眾不同。
They are equipped with graphic color displays and are easy to operate from a detachable control panel or from a distance using a remote control.
它們配備了圖形化彩色顯示器，易于在一個(gè)可分拆的控制面板或者遠(yuǎn)程控制器上進(jìn)行操作。
The menu navigation is user-friendly and easy to operate.
菜單導(dǎo)航是用戶友好型的，而且易于操作。
The ASM 310 Leak Detector: compact design and high performance The ASM 310 portable leak detector stands out particularly due to its smart design with a retractable handle and its small footprint.
ASM 310泄漏探測器：緊湊設(shè)計(jì)和高級性能
ASM 310 泄漏探測器之所以如此出眾，尤其得歸功于其智能設(shè)計(jì)，體現(xiàn)在有一個(gè)可伸縮的手柄和較小占用空間。
At only 21 kg it is still a complete vacuum system, it has the same detector technology and offers the same level of sensitivity as larger models.
雖然僅有21kg，它仍然是一個(gè)完整的真空系統(tǒng)，具有同樣的探測器技術(shù)，并提供與較大型號裝置同樣水平的敏感度。
Thanks to the clean, oil-free pumping system, the ASM 310 is the right choice for leak detection in systems which do not tolerate any contamination.
歸功于清潔的無油泵送系統(tǒng)， ASM 310對不允許有任何污染的系統(tǒng)的泄漏探測是正確選擇。
It provides high performance in leak testing where mobility is crucial.
在移動性起到關(guān)鍵作用的情況下，它能提供泄漏檢驗(yàn)的高性能。
The ASM 310 can be operated in any position and has an integrated SD memory card for data recording.
ASM 310可以在任何位置進(jìn)行操作，帶有一個(gè)集成的SD記憶存儲卡，可用于數(shù)據(jù)記錄。
In addition to data, configurations and operating parameters can be documented using the SD card and can be downloaded or transferred to other devices.
除數(shù)據(jù)外，配置和操作參數(shù)也可以使用該SD卡予以記錄，并被下載或傳輸?shù)狡渌�裝置。
 
The intuitive menu can be individually adapted and protected with a password.
直觀的菜單可以是個(gè)別適合的，并有密碼保護(hù)。
This prevents unauthorized changes from being made to the settings.
這就能夠阻止對有關(guān)設(shè)置進(jìn)行未經(jīng)授權(quán)的更改。
The portable MiniTest combines innovative technology with ultralight weight The MiniTest portable helium leak detector weighs only a sensational 5 kg!
袖珍型微型檢驗(yàn)探測器將創(chuàng)新性技術(shù)和超輕重量組合在一起。袖珍型微型氦氣泄漏探測器重量只有驚人的5kg！
It is the first vacuum leak detector on the market which works with a quartz window sensor.
Thanks to this innovative technology, it stands out due to its lightweight design and small footprint.
它是市場上第一種以石英窗口傳感器配合工作的真空泄漏探測器。歸功于這種創(chuàng)新性技術(shù)，它才如此與眾不同，體現(xiàn)在輕型重量設(shè)計(jì)和很小占用空間。
The uncomplicated operation and optional wireless remote control enable helium leak detection to be carried out even in large systems by only one person.
無復(fù)雜可言的操作和可選無線遠(yuǎn)程控制使得氦氣泄漏探測可以由一位工作人員即使是在大型系統(tǒng)內(nèi)進(jìn)行作業(yè)。
The MiniTest can work at a high inlet pressure of up to 200 mbar and is not sensitive to water vapor.
微型檢驗(yàn)探測器可以在高進(jìn)氣壓力（可高達(dá)200 bar）的情況工作，而且不對水蒸汽具有敏感性。
This makes it the ideal solution for leak detection in power plants, vacuum furnaces and vacuum systems as well as in heat exchangers.
這使它成為電廠、真空爐、真空系統(tǒng)以及熱交換器應(yīng)用場合泄漏探測的理想解決方案。
The data recording function on the remote control via USB interface makes this unit a user-friendly data logger.
通過USB接口實(shí)現(xiàn)的位于遠(yuǎn)程控制器上數(shù)據(jù)記錄功能使該裝置成為用戶友好型的數(shù)據(jù)記錄員。
Since it is practically maintenance-free, it is also cost-efficient both in operation and in long-term use.
因?yàn)樗鼘?shí)際上是無須維護(hù)的，所以在運(yùn)行當(dāng)中以及長期使用過程中，它都是成本效益很高的。
The leak detectors in our ASM 340 series guarantee top performance in vacuum or sniffing leak detection for various applications, from maintenance to applications in small production environments.
我們的ASM 340 泄漏探測器確保各種應(yīng)用場合下（在小型生產(chǎn)環(huán)境從維護(hù)到應(yīng)用）在真空或嗅聞泄漏探測方面的頂級性能。
These dependable leak detectors can be used both for qualitative localization of leaks as well as quantitative global or local testing.
此等可靠的泄漏探測器可用于泄漏的定量化位置，也可以用于全球的或本地的定量化檢驗(yàn)。
Multipurpose leak detectors by PV combine high performance and easy operation with the reliability which you have come to expect.
PV的多用途泄漏探測器將高性能、易操作和您期待的可靠性組合在一起。
ASM 340 - the best in class compact multipurpose leak detectors The leak detectors in our ASM 340 series guarantee top performance in vacuum or sniffing leak detection for various applications, from maintenance to applications in small production environments.
ASM 340 – 系緊湊多用途泄漏探測器類別中最好的。我們ASM 340 系列的泄漏探測器確保各種應(yīng)用場合下（在小型生產(chǎn)環(huán)境從維護(hù)到應(yīng)用）在真空或嗅聞泄漏探測方面的頂級性能。
 
These dependable leak detectors can be used both for qualitative localization of leaks as well as quantitative global or local testing.
此等可靠的泄漏探測器可用于泄漏的定量化位置，也可以用于全球的或本地的定量化檢驗(yàn)。
 
They are the only leak detectors in their class offering qualitative leak detection starting at 100 hPa before reaching the inlet test pressure.
它們是該類別中唯一能提供定量化泄漏探測的泄漏探測器，定量化的起點(diǎn)為100 hPa，到達(dá)到進(jìn)氣檢驗(yàn)壓力為止。
The ASM 340 is characterized by its powerful pumping system and available in conventional or dry versions.
ASM 340以強(qiáng)大的泵送系統(tǒng)為其特征，而且有傳統(tǒng)的或干式版本。
Easy operation, ultra fast response time and short recovery time are among the outstanding features of these compact multipurpose units.
易于操作、超快響應(yīng)時(shí)間和較短恢復(fù)時(shí)間都是此等緊湊型多用途裝置的卓越特性。
The ASM 340 is the perfect solution for everyday testing even in severe test conditions.
即使是在嚴(yán)苛檢驗(yàn)情況下，ASM 340都是日常檢驗(yàn)的理想解決方案。
ASM 340 with conventional pumping Those compact leak detectors are equipped with the largest backing pumps of their class allowing extremely fast cycle times.
ASM 340 帶有傳統(tǒng)的泵送系統(tǒng)。此等緊湊泄漏探測器配備有其同類別中最大的支持泵，使之有極短的循環(huán)周期。
ASM 340 D with dry pumps The dry ASM 340 D units are equipped with diaphragm pumps.
They are used in any applications where very clean test conditions are required.
帶干式泵的ASM 340
干式ASM340 裝置配備有隔膜泵。在任何需要非常清潔的檢驗(yàn)情況下，均可以使用這種裝置。
ASM 340 I without backing pump This specific unit offers maximum flexibility and is typically used for the integration into leak detection systems.
不帶支持泵的ASM 340
這種特殊的裝置提供了最大的彈性，主要用于集成到泄漏探測系統(tǒng)。
Customer benefits:
客戶收益：
Fastest time to test in its class High backing pump capacity for versatile use Rapid response time due to high helium pumping speed Unique capability to detect leaks starting at 100 hPa Impressive results in sniffing test mode, with 5•10 -10 Pa m 3 /s minimum detectable leak rate for helium Low maintenance due to rugged design Integrated SD memory card for recording, downloading and parameter setting Detachable color control panel for enhanced ergonomics User friendly and customizable interface Complete range of I/O and Profibus communication available
在其類別當(dāng)中，具有最短的檢驗(yàn)時(shí)間；適合各種用途的高級支持泵容量；因高氦氣泵送速度而帶來的快速響應(yīng)時(shí)間；探測從100 hPa起的泄漏的獨(dú)一無二的能力；在嗅聞檢驗(yàn)?zāi)Ｊ街辛钊擞∠笊羁痰慕Y(jié)果；因氦氣低維護(hù)而實(shí)現(xiàn)的5•10 -10 Pa m ³ /s最小可探測泄漏比率；因堅(jiān)固設(shè)計(jì)集成的SD記憶存儲卡而實(shí)現(xiàn)的記錄、下載和參數(shù)設(shè)置；加強(qiáng)人機(jī)工程學(xué)應(yīng)用的可分拆的彩色控制面板；用戶友好型和定制的界面；可獲的完整的輸入/輸出（I/O）和過程現(xiàn)場總線（Profibus）通信系統(tǒng)。
 
Applications
應(yīng)用
R & D Aeronautic industry Mechanical engineering Measuring technology Refrigeration Air conditioning Semiconductor technology Leak detection systems
研究和開發(fā)、航空業(yè)、機(jī)械工程、測量技術(shù)、制冷、空調(diào)、半導(dǎo)體技術(shù)中所用的泄漏測試系統(tǒng)
The modular leak detector for easy and quick integration into industrial leak detection systems provides you with high performance, reliable and repeatable testing.
可用于簡易快捷集成到工業(yè)泄漏探測系統(tǒng)的模塊泄漏探測器能提供高性能的、可靠的和可重復(fù)的檢驗(yàn)。
Leak Detectors for Industrial Leak Detection Systems Modular leak detectors were designed for integration into industrial leak detector systems.
用于工業(yè)泄漏探測系統(tǒng)的泄漏探測器，模塊泄漏探測器的設(shè)計(jì)目的就是集成到工業(yè)泄漏探測系統(tǒng)。
They can be flexibly adapted to a wide range of leak detection applications and environments in the production of electrical and mechanical parts, such as for the automotive industry, and in evaporator and compressor production for refrigeration and air conditioning.
它們可以靈活地適應(yīng)電氣和機(jī)械部件生產(chǎn)過程中廣泛范圍的泄漏探測應(yīng)用和環(huán)境，如汽車行業(yè)，以及適應(yīng)制冷和空調(diào)行業(yè)蒸發(fā)器和壓縮機(jī)生產(chǎn)過程中泄漏探測應(yīng)用和環(huán)境。
The modular design and small footprint of the ASI 30 enables it to be easily integrated into existing systems.
ASI 30 的模塊化設(shè)計(jì)及小占用空間使之可以容易集成到現(xiàn)有系統(tǒng)。
A particular feature is the leak detector's ease of use.
特別的特點(diǎn)就是泄漏探測者使用的簡易性。
Its high reliability and short maintenance times are crucial for avoiding production downtimes and quality problems.
其高可靠性和短維護(hù)時(shí)間對避免生產(chǎn)中斷和質(zhì)量問題而言是關(guān)鍵的。
The ASI 30: flexible and reliable The ASI 30 modular leak detector is specially adapted to meet the requirements of machine builders and their end users.
ASI 30：有彈性和可靠性。ASI 30 模塊特別適合于滿足機(jī)器制造者及其終端用戶需求的場合。
The modular design of this leak detector allows it to be integrated flexibly and easily into leak detection systems.
這種泄漏探測的模塊化設(shè)計(jì)使之可以靈活便捷地集成到泄漏探測系統(tǒng)。
The vacuum module with its analyzer cell and calibrated test leak can be installed in any position.
The electronic module and the optional control panel are ready for inserting in half 19" racks.
帶有分析儀單元和校準(zhǔn)檢驗(yàn)泄漏的真空模塊可以在任何位置予以安裝。電子模塊和可選控制面板已經(jīng)就緒，可以插入半19”機(jī)架當(dāng)中。
They can be fitted in any part of the system or in a cabinet under controlled environmental conditions.
在可控的環(huán)境條件下，它們可以在系統(tǒng)的任何部分或在一個(gè)柜體內(nèi)固定。
The leak detector can be controlled without a control panel simply through a PC or PLC as it has a wide range of interfaces and complies with all industrial standards.
泄漏探測器可以僅僅通過一臺電腦或PLC（可編程序控制器）進(jìn)行控制，而無需一個(gè)控制面板，因?yàn)樗�有范圍廣泛的界面，并符合所有有關(guān)工業(yè)標(biāo)準(zhǔn)。
The rugged design of the ASI 30 ensures long-term maximum availability of the unit under production conditions.
ASI 30的堅(jiān)固設(shè)計(jì)確保了在生產(chǎn)條件下該裝置的最大長期可獲性。
 
多級泵：
Multi-stage Roots pumps by PV produce clean and dry vacuum for various applications and markets.
PV羅茨多級泵為各種應(yīng)用和市場生產(chǎn)清潔和干燥真空環(huán)境。
The solution for clean and dry applications Multi-stage Roots pumps by PV are used in different areas of application.
作為清潔和干燥應(yīng)用場合的解決方案，PV羅茨多級泵可用于不同的應(yīng)用領(lǐng)域。
Small ACP-Roots pumps create, for example, the required fore-vacuum for turbopumps in particle accelerators.
小型ACP-羅茨泵能生產(chǎn)，例如，粒子加速器所用渦輪泵所需的前級真空。
Large ACP 120 with their high pumping speed and low final pressure are used in freeze-drying applications.
具有到泵送速度和低最終壓力的大型ACP 120可用于冷凍干燥應(yīng)用場合。
The A 100, A3P or A3H series dry pumps are used in large numbers as process pumps in the semiconductor and coating industry.
A 100、A3P或A3H系列干式泵作為過程泵可大量用于半導(dǎo)體和噴涂工業(yè)。
Nevertheless, all of these areas have one thing in common: they require a clean and dry vacuum.
The technology of the multi-stage Roots pumps is the perfect solution here.
然而，此等菱悅均有一個(gè)共同的特點(diǎn)：它們均需要清潔和干燥的真空環(huán)境。
Lubricants and sealing material between the rotor and stator are not required by the frictionless working pumping module.
無摩擦工作泵送環(huán)境不需要轉(zhuǎn)子和定子之間的潤滑劑和密封材料。
Thus, hydrocarbon vapor backstreaming can be avoided.
因此，可以避免烴類蒸汽的回流。
In the suction chamber of the pumps, no sealing materials are processed.
在泵的吸入室，無任何密封材料是被處理的。
This means the pumps are free of particles, extremely reliable and stable for a long period of time which results in low cost of ownership.
這意味著泵是沒有顆粒物的，長期內(nèi)均是非常可靠和穩(wěn)定的，這將帶來業(yè)主的低成本結(jié)果。
Areas of usage for multi-stage Roots pumps in clean processes Air-cooled multi-stage Roots pumps from the ACP series are very low maintenance and are distinguished through their constant performance.
在清潔過程中羅茨多級泵以及ACP系列的空氣冷卻羅茨多級泵的使用領(lǐng)域是需要極少維護(hù)的，憑其恒定的性能脫穎而出。
They are used in analytical applications as well as in clean processes for semiconductor production and plasma cleaning.
它們可用于分析應(yīng)用場合以及半導(dǎo)體生產(chǎn)和等離子清洗行業(yè)的清潔過程當(dāng)中。
The compact Roots pump A 100 L can be easily integrated in systems due to their small dimensions.
A 100 緊湊羅茨泵因其較小尺寸而可以便捷集成到有關(guān)系統(tǒng)。
Load locks and transfer chambers from semiconductor and photovoltaic production systems are typical areas of application for this type of pump.
半導(dǎo)體和光伏生產(chǎn)系統(tǒng)的負(fù)載鎖和傳輸室是這種類型泵的典型應(yīng)用領(lǐng)域。
The multi-stage Roots pumps with water cooling of the ACP 120 series are produced of robust die cast metal.
ACP 120 系列的帶有水冷卻的羅茨多級泵是用結(jié)實(shí)的模鑄材料制成。
Just like the Roots vacuum pumping stations ACG 600, they are used in research and development, vacuum coating and metallurgy when high pumping speed is required.
就像羅茨真空泵送站ACG 600， 它們是用于需要較高泵送速度場合的研究、開發(fā)、真空噴涂和冶金行業(yè)的。
Aggressive applications are not a problem Multi-stage Roots pumps from the A3P series were developed for applications in medium duty processes for semiconductor and photovoltaic production, in which slightly corrosive gases or condensation must be transported.
具有侵略性的應(yīng)用也不是問題，A3P系列的羅茨多級泵的開發(fā)目的就是為了半導(dǎo)體和光伏生產(chǎn)所需媒介材料過程應(yīng)用的，在這種過程中輕微腐蝕性氣體或冷凝物是必需被運(yùn)輸出來的。
The pumps are compact and energy-efficient.
此等泵是緊湊的和高能效的。
The low noise development and the low vibration level are outstanding characteristics of the series.
低噪音開發(fā)和低振動水平是該系列的突出特點(diǎn)。
The pumps of the A3H series with a pumping speed of up to 1,800 m 3 /h are made of corrosion resistant materials.
泵送速度可高達(dá)1,800 m³/h 的A3H系列泵是用防腐材料制成的。
Media tolerability also with high gas throughput make these multi-stage Roots pumps the best solution for usage in CVD-processes in the semiconductor industry.
媒介容忍度以及高氣體生產(chǎn)量水平使此等羅茨多級泵成為半導(dǎo)體行業(yè)CVD過程應(yīng)用的最佳解決方案。

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